Keithley 590

C-V Analyser with option 5902 The Keithley 590 C-V Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the 590 has been tailored to the requirements of semiconductor device testing. High frequency (100kHz or 1MHz) C-V measurements are commonly applied to test p-n or schottky junction and Metal-Insulator-Semiconductor (MIS) devices for device characterization and process control. C-V results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation • 100kHz, 1MHz, or 100kHz/1MHz test structures. Measure C-V and C-t, Not Just Capacitance C-V and C-t data are used to determine important characteristics such as semiconductor doping profiles, threshold voltage, oxide characteristics, mobile ion density, interface trap density, and minority carrier lifetime.